The combination of optical angular mutiplexing and Echelon Free Induced Spatial Incoherence (EFISI) is a best choice for the pulse compression and beam smoothing in a high power excimer laser system, which relates to the transportation and amplification of smoothed narrow laser pulse mainly. In this paper, the construction of a partial coherence oscillator by scattering method was described and primary results for pulse shaping were provided. Then, the gain characteristics for five laser amplifiers by single-pass amplifications and simulations of different output couplings were discussed, and measures to control over Amplification Spontaneous Emission (ASE) in the short laser pulse amplification was described. Finally,the Main Oscilation Power Amplifer(MOPA) chain of a single-beam XeCl laser and primary results were introduced. Obtained results show that the final output energy is 5-6 J with a pulsewidth around 10 ns and the focal spot is around 300 μm in the diameter. These results indicate that the laser chain and optical design are reasonable, which can be used as a good guide for the specific design of full scale angular multiplexed laser MOPA system.