To solve the problems of large-scale and high-precision measurement as well as geometrical parameter characterization of complex microstructures, a composite micro-and nano-measuring instrument was developed based on multi-probe sensing and precise positioning platform multiplexing technology. To realize high-speed scans of a large area and fine measurement of a small area, a White Light Interference(WLI) microscope and an Atomic Force Microscope (AFM) were integrated into the bridge structure of the instrument.A macro/micro-driving platform was designed and tested to meet the positioning range and accuracy requirements. The instrument could work on in a contact or noncontact mode.Furthermore, different geometrical parameters could be characterized by the instrument. The instrument was calibrated using a nano dimensional standard to ensure accuracy and traceability. The WLI resolution of the instrument can reach 500 nm in the lateral direction and 1 nm in the vertical direction. The AFM resolution is better than 1 nm in both the lateral and vertical directions. Lastly, a micro ball was measured and its surface geometrical characteristics were obtained by large-range imaging and small-range fine scanning. Thus, the instrumental capability was verified.