Optics and Precision Engineering, Volume. 17, Issue 8, 1915(2009)
High performance electromagnetic micro-machined ring vibration gyroscope
To realize mode matching and high quality factors (Q) and to improve the performance of micro-machined ring vibration gyroscopes,a novel electromagnetic ring vibration gyroscope was designed and fabricated by using a centrosymmetric and enantiomorphous structure consisting of a ring and eight symmetric support springs to match the resonant frequencies of a drive mode and a sense mode.The theoretical models for the sensitivity and the mechanical noises of the gyroscope were deduced,and the effects of gyroscope parameters on the sensitivity and resolution were analyzed.Through the standard bulk MEMS processes,the gyroscope samples were fabricated with (100) silicon.Experiments show that all the processes are easy to realize,for they have no bonding operation.Moreover,a frequency response experiment indicates that the frequency split between the drive mode and the sense mode is less than 0.5 Hz,and the quality factor is about 500 in atmosphere and 14 000 in vacuum with 1 Pa.Phase Locked Amplifier(PLA) tests show that the resolution of the gyroscope is 0.05 °/s and the sensitivity is 0.2 μV/(°/s) over the ranges of -200 ~200 °/s.
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CHEN Li, CHEN De-yong, WANG Jun-bo, WU Zheng-wei, ZHANG Ming. High performance electromagnetic micro-machined ring vibration gyroscope[J]. Optics and Precision Engineering, 2009, 17(8): 1915
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Received: Jun. 14, 2008
Accepted: --
Published Online: Oct. 28, 2009
The Author Email: Li CHEN (xuefeng1025@163.com)
CSTR:32186.14.