International Journal of Extreme Manufacturing, Volume. 3, Issue 1, 12001(2021)

Helium-ion-beam nanofabrication: extreme processes and applications

Shixuan He1,2, Rong Tian1, Wei Wu3, Wen-Di Li4, and Deqiang Wang1、*
Author Affiliations
  • 1Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, People’s Republic of China
  • 2College of Physics, Sichuan University, Chengdu, Sichuan 610065, People’s Republic of China
  • 3Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089, United States of America
  • 4Department of Mechanical Engineering, The University of Hong Kong, Pokfulam, Hong Kong, People’s Republic of China
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    Helium ion beam (HIB) technology plays an important role in the extreme fields of nanofabrication. This paper reviews the latest developments in HIB technology as well as its extreme processing capabilities and widespread applications in nanofabrication. HIB-based nanofabrication includes direct-write milling, ion beam- induced deposition, and direct-write lithography without resist assistance. HIB nanoscale applications have also been evaluated in the areas of integrated circuits, materials sciences, nano-optics, and biological sciences. This review covers four thematic applications of HIB: (1) helium ion microscopy imaging for biological samples and semiconductors; (2) HIB milling and swelling for 2D/3D nanopore fabrication; (3) HIB-induced deposition for nanopillars, nanowires, and 3D nanostructures; (4) additional HIB direct writing for resist, graphene, and plasmonic nanostructures. This paper concludes with a summary of potential future applications and areas of improvement for HIB extreme nanofabrication technology.

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    Shixuan He, Rong Tian, Wei Wu, Wen-Di Li, Deqiang Wang. Helium-ion-beam nanofabrication: extreme processes and applications[J]. International Journal of Extreme Manufacturing, 2021, 3(1): 12001

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    Paper Information

    Category: Topical Review

    Received: May. 10, 2020

    Accepted: --

    Published Online: Sep. 3, 2021

    The Author Email: Wang Deqiang (dqwang@cigit.ac.cn)

    DOI:10.1088/2631-7990/abc673

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