Acta Photonica Sinica, Volume. 40, Issue 11, 1625(2011)

Micro Scanning Mirrors with Laser Diode for Pattern Generation

LI Zhao, YUAN Weizheng, WU Meng, YAN Bin, QIAO Dayong, and LIU Yaobo
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    A novel micro scanning mirror based on MEMS technology with a laser diode could be used in the projection of Lissajous patterns. Two micro scanning mirrors twisted in Xaxis and Yaxis are used to deflect the laser beam onto the desired projection area to draw a 2dimensional pattern. The optical scanning angle of the mirror can reach ±12° in 15V square wave driving signal at twice the mirror′s resonant frequency. Given the sinusoidal movement of the mirrors in each axis, the laser beam follows a Lissajous pattern. Through analyzing the principle of the generated patterns and simulating them with Matlab, oscillation frequency combination of 2 400 Hz(Xaxis) and 2 425 Hz (Yaxis) for image generation is chosen. This combination can achieve 194×192 pixels at refresh frequency 25 Hz which is enough for movie frames. A method of projecting arbitrary images by modulating the laser diode through FPGA is given, which provides the basis for developing micro projectors.

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    LI Zhao, YUAN Weizheng, WU Meng, YAN Bin, QIAO Dayong, LIU Yaobo. Micro Scanning Mirrors with Laser Diode for Pattern Generation[J]. Acta Photonica Sinica, 2011, 40(11): 1625

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    Paper Information

    Received: Jul. 6, 2011

    Accepted: --

    Published Online: Dec. 12, 2011

    The Author Email:

    DOI:10.3788/gzxb20114011.1625

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