Acta Photonica Sinica, Volume. 40, Issue 11, 1625(2011)
Micro Scanning Mirrors with Laser Diode for Pattern Generation
A novel micro scanning mirror based on MEMS technology with a laser diode could be used in the projection of Lissajous patterns. Two micro scanning mirrors twisted in Xaxis and Yaxis are used to deflect the laser beam onto the desired projection area to draw a 2dimensional pattern. The optical scanning angle of the mirror can reach ±12° in 15V square wave driving signal at twice the mirror′s resonant frequency. Given the sinusoidal movement of the mirrors in each axis, the laser beam follows a Lissajous pattern. Through analyzing the principle of the generated patterns and simulating them with Matlab, oscillation frequency combination of 2 400 Hz(Xaxis) and 2 425 Hz (Yaxis) for image generation is chosen. This combination can achieve 194×192 pixels at refresh frequency 25 Hz which is enough for movie frames. A method of projecting arbitrary images by modulating the laser diode through FPGA is given, which provides the basis for developing micro projectors.
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LI Zhao, YUAN Weizheng, WU Meng, YAN Bin, QIAO Dayong, LIU Yaobo. Micro Scanning Mirrors with Laser Diode for Pattern Generation[J]. Acta Photonica Sinica, 2011, 40(11): 1625
Received: Jul. 6, 2011
Accepted: --
Published Online: Dec. 12, 2011
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