Laser & Optoelectronics Progress, Volume. 54, Issue 5, 50001(2017)
Large-Scale Photonic Integration Technologies Based on Multi-Project Wafer Flow Sheet
With the rapid growth of communication capacity of optical networks, integrating discrete optical devices into a single chip to reduce footprint and cost becomes a development of optoelectronic devices. Photonic integrated circuit has many advantages such as small footprint, low power consumption and light weight, and it is a key technology for future broad-bandwidth optical networks to solve the problems of large energy consumption, large volume and small capacity. We review three kinds of large-scale photonic integration technologies which are based on multi-project wafer flow sheets, including silicon-based photonic integration technology, Ⅲ-Ⅴ indium phosphide integration technology and TriPleX integration technology which consists of multilayer waveguides of silicon nitride and silicon oxide. Three foundries supporting multi-project wafer sheet photonic integration technologies are introduced, and some chip examples realized by these foundries are presented. The comparison of technology parameters among different foundries is carried out.
Get Citation
Copy Citation Text
Zheng Xiu, Liu Yong. Large-Scale Photonic Integration Technologies Based on Multi-Project Wafer Flow Sheet[J]. Laser & Optoelectronics Progress, 2017, 54(5): 50001
Category: Reviews
Received: Nov. 21, 2016
Accepted: --
Published Online: May. 3, 2017
The Author Email: Xiu Zheng (xiu_zheng_lamu@yeah.net)