Laser & Optoelectronics Progress, Volume. 54, Issue 5, 50001(2017)

Large-Scale Photonic Integration Technologies Based on Multi-Project Wafer Flow Sheet

Zheng Xiu1,2、* and Liu Yong1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    With the rapid growth of communication capacity of optical networks, integrating discrete optical devices into a single chip to reduce footprint and cost becomes a development of optoelectronic devices. Photonic integrated circuit has many advantages such as small footprint, low power consumption and light weight, and it is a key technology for future broad-bandwidth optical networks to solve the problems of large energy consumption, large volume and small capacity. We review three kinds of large-scale photonic integration technologies which are based on multi-project wafer flow sheets, including silicon-based photonic integration technology, Ⅲ-Ⅴ indium phosphide integration technology and TriPleX integration technology which consists of multilayer waveguides of silicon nitride and silicon oxide. Three foundries supporting multi-project wafer sheet photonic integration technologies are introduced, and some chip examples realized by these foundries are presented. The comparison of technology parameters among different foundries is carried out.

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    Zheng Xiu, Liu Yong. Large-Scale Photonic Integration Technologies Based on Multi-Project Wafer Flow Sheet[J]. Laser & Optoelectronics Progress, 2017, 54(5): 50001

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    Paper Information

    Category: Reviews

    Received: Nov. 21, 2016

    Accepted: --

    Published Online: May. 3, 2017

    The Author Email: Xiu Zheng (xiu_zheng_lamu@yeah.net)

    DOI:10.3788/lop54.050001

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