Infrared and Laser Engineering, Volume. 34, Issue 1, 110(2005)
Development and application of MOEMS optical system
The sorts and characteristics of the Micro-Opto-Electro-Mechanical System (MOEMS) are presented, and several kinds of important MOEMS′ products are described.Within the discussion it refered the working mechanism,the applications in optoelectric field and its development outlook. Some advice for MOEMS research are presented.
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[in Chinese]. Development and application of MOEMS optical system[J]. Infrared and Laser Engineering, 2005, 34(1): 110
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