Laser & Optoelectronics Progress, Volume. 57, Issue 6, 061018(2020)

Chip Crack Imaging Detection Based on Line Laser Phase-Locked Thermal Imaging

Ying Xu1、*, Qingyuan Wang1, Congcong Luo1, and Sohn Hoon2
Author Affiliations
  • 1College of Civil and Environmental Engineering, Harbin Institute of Technology (Shenzhen), Shenzhen Key Lab of Urban & Civil Engineering Disaster Prevention & Reduction, Shenzhen, Guangdong 518055, China;
  • 2Department of Civil and Environmental Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34708, Republic of Korea
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    This paper proposes a new linear laser phase-locked thermal imaging technology for surface crack instantaneous imaging detection of semiconductor chips. The technical system consists of a linear scanning laser source, a high-speed infrared camera, and a control computer. The surface of the target chip is scanned by a linear laser beam and the thermal wave propagation is measured by an infrared camera. A new visualization algorithm without baseline crack is proposed. Because cracks can cause thermal wave blocking, they can be visualized and diagnosed automatically, which is independent of baseline data obtained from the original state of the target chip. The microcracks of the chips generated in the manufacturing process are studied. The experiments demonstrate that the visualization of cracks with a width of tens of micrometers can be realized by the laser phase-locked thermal imaging technology.

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    Ying Xu, Qingyuan Wang, Congcong Luo, Sohn Hoon. Chip Crack Imaging Detection Based on Line Laser Phase-Locked Thermal Imaging[J]. Laser & Optoelectronics Progress, 2020, 57(6): 061018

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    Paper Information

    Category: Image Processing

    Received: Jul. 29, 2019

    Accepted: Sep. 24, 2019

    Published Online: Mar. 6, 2020

    The Author Email: Xu Ying (cexyx@hotmail.com)

    DOI:10.3788/LOP57.061018

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