Chinese Journal of Lasers, Volume. 46, Issue 5, 0504002(2019)

Phase Retrieval Methods for Single Interferogram with Large Gradient Phase

Mingzhe Ye1, Shaopu Wang2, Yao Hu1、*, and Qun Hao1
Author Affiliations
  • 1Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology,School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
  • 2Beijing Institute of Spacecraft Environment Engineering, Beijing 100094, China
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    To meet the requirement of on-line detection of large gradient phases in machining, a single interferogram phase retrieval method based on the digital moiré phase shift algorithm and the Newton iteration algorithm is proposed herein. In the simulation, we compared the proposed method with three typical phase retrieval methods for single interferogram under different phases to be measured. The results show that the proposed method has high accuracy. We then experimentally measured the large gradient phase produced by a defocused sphere, and compared our result with the measurement result of mechanical phase shift in the interferometer produced by ZYGO corporation. The effectiveness of the proposed method is verified.

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    Mingzhe Ye, Shaopu Wang, Yao Hu, Qun Hao. Phase Retrieval Methods for Single Interferogram with Large Gradient Phase[J]. Chinese Journal of Lasers, 2019, 46(5): 0504002

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    Paper Information

    Category: measurement and metrology

    Received: Nov. 27, 2018

    Accepted: Feb. 18, 2019

    Published Online: Nov. 11, 2019

    The Author Email: Hu Yao (huy08@bit.edu.cn)

    DOI:10.3788/CJL201946.0504002

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