Laser & Optoelectronics Progress, Volume. 61, Issue 8, 0811003(2024)
High-Resolution Ptychography Method to Solve the Limitation Problem of Numerical Aperture and Pixel Size
Imaging resolution of the ptychography is limited by the numerical aperture and CCD (charge coupled device) pixel size. When the CCD target surface is limited, the numerical aperture is limited, and the high-frequency information of the edge of the CCD target surface is easy to miss under the condition that the collected spot is large. In addition, the larger pixel size leads to insufficient sampling rate during imaging, and some detailed high-frequency information will be lost. We propose a high-resolution ptychography method, which can simultaneously solve the resolution problem limited by the numerical aperture and CCD pixel size. First, the extrapolation method is used to supplement the higher-order diffraction information lost due to the limited numerical aperture, and the image reconstructed by the extrapolation method is substituted into the generative adversarial network based on the multi-weight loss function, which can quickly solve the problem of pixel size limitation and improve the imaging resolution. The multi-weight loss function is the weighted sum of mean square error, feature map error and adversarial error. By setting reasonable weights, the pixel and visual level can be balanced. The simulation and experimental results show that this method has a significant effect on improving the resolution of the ptychography and has high computational efficiency.
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Jingyi Zhang, Zihao Pei, Youyou Hu, Zhongming Yang, Jiantai Dou. High-Resolution Ptychography Method to Solve the Limitation Problem of Numerical Aperture and Pixel Size[J]. Laser & Optoelectronics Progress, 2024, 61(8): 0811003
Category: Imaging Systems
Received: Jun. 2, 2023
Accepted: Jul. 24, 2023
Published Online: Mar. 1, 2024
The Author Email: Dou Jiantai (jiantai.dou@just.edu.cn)