Laser & Optoelectronics Progress, Volume. 57, Issue 7, 071607(2020)

Development and Preparation of Refractive Infrared Microlens Array Device

Feng Liu1,2, Fan Zhang1,2, Hao Bian1,2, Qing Yang1,3, Minjing Li1,3, and Feng Chen1,2、*
Author Affiliations
  • 1State Key Laboratory for Manufacturing System Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
  • 2Shaanxi Key Laboratory of Photonics Technology for Information, School of Electronics & Information Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China;
  • 3School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
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    Miniaturization and integration of optical devices are important trends in the development of modern optical systems. In micro-optical devices, arrayed refractive imaging micro-optical devices mainly include microlens array devices, which are widely used in imaging, metrology, beam shaping and other fields. In response to the special application requirements in the infrared band imaging, metrological measurement, laser processing and other fields, microlens array devices working in the infrared band have received extensive attention and have developed rapidly. This paper summarizes the development and preparation methods of infrared microlens array devices, including the preparation of infrared micro-optical devices with different materials and manufacturing methods, and the application of infrared micro-lens array devices in infrared band imaging, metrology, parallel processing, and beam homogenization. The challenges and opportunities of infrared microlens array devices and their manufacturing methods are also analyzed.

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    Feng Liu, Fan Zhang, Hao Bian, Qing Yang, Minjing Li, Feng Chen. Development and Preparation of Refractive Infrared Microlens Array Device[J]. Laser & Optoelectronics Progress, 2020, 57(7): 071607

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    Paper Information

    Special Issue:

    Received: Jan. 2, 2020

    Accepted: Feb. 11, 2020

    Published Online: Mar. 31, 2020

    The Author Email: Chen Feng (chenfeng@mail.xjtu.edu.cn)

    DOI:10.3788/LOP57.071607

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