Acta Optica Sinica, Volume. 36, Issue 12, 1212001(2016)
A Multi-Range Merging Method for Phase Shift Shadow Moiré Profilometry with Large Depth Measuring Range
The depth measuring range is limited by conventional shadow moiré profilometry. In order to solve the problem, a new method of shadow moiré profilometry, which can increase the depth measuring range, is proposed according to the fringe contrast characteristic of shadow moiré. When the grating is placed at different depths, moiré fringes will be formed on the surface. The shadow moiré profilometry with large depth measurement range is realized by merging the fringe phase measurement results of different depth ranges. The phase distributions of moiré fringes at different depths are analyzed. Methods for phase merging and error compensation are proposed based on the overlapping region. The feasibility and veracity of the proposed method are verified by experiments.
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Ai Yongxu, Zhou Xiang, Du Hubing, Guo Jiayu, Fei Zixuan, Li Dong. A Multi-Range Merging Method for Phase Shift Shadow Moiré Profilometry with Large Depth Measuring Range[J]. Acta Optica Sinica, 2016, 36(12): 1212001
Category: Instrumentation, Measurement and Metrology
Received: Jun. 6, 2016
Accepted: --
Published Online: Dec. 14, 2016
The Author Email: Yongxu Ai (aiyongxuxj@163.com)