Acta Optica Sinica, Volume. 20, Issue 9, 1255(2000)
Experimental Study on Soft X-Ray Diffraction of a Two-Dimensional Array
The experiment of soft X-ray diffraction has been carried out with synchrotzon radiation to a two-dimensional array.Some images,which correspond to 0,2mm and 80 mm separation behind the specimen,were recorded as a relief pattern on photoresist with use of 3.2 nm X-rays from U-12A bending magnet at National Synchrotron Radiation Laboratory.The processed photoresists were enlarged with an optical microscope.The experimental result shows that patterns vary with the distance between specimen and photoresist detector,which are in excellent agreement with the theoretical results.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Experimental Study on Soft X-Ray Diffraction of a Two-Dimensional Array[J]. Acta Optica Sinica, 2000, 20(9): 1255