Spectroscopy and Spectral Analysis, Volume. 34, Issue 8, 2238(2014)
Progress in the Application of Laser Ablation ICP-MS to Surface Microanalysis in Material Science
In the present paper, apparatus and theory of surface analysis is introduced, and the progress in the application of laser ablation ICP-MS to microanalysis in ferrous, nonferrous and semiconductor field is reviewed in detail. Compared with traditional surface analytical tools, such as SEM/EDS (scanning electron microscopy/energy dispersive spectrum), EPMA (electron probe microanalysis analysis), AES (auger energy spectrum), etc. the advantage is little or no sample preparation, adjustable spatial resolution according to analytical demand, multi-element analysis and high sensitivity. It is now a powerful complementary method to traditional surface analytical tool. With the development of LA-ICP-MS technology maturing, more and more analytical workers will use this powerful tool in the future, and LA-ICP-MS will be a super star in elemental analysis field just like LIBS (Laser-induced breakdown spectroscopy).
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ZHANG Yong, JIA Yun-hai, CHEN Ji-wen, SHEN Xue-jing, LIU Ying, ZHAO Lei, LI Dong-ling, HANG Peng-cheng, ZHAO Zhen, FAN Wan-lun, WANG Hai-zhou. Progress in the Application of Laser Ablation ICP-MS to Surface Microanalysis in Material Science[J]. Spectroscopy and Spectral Analysis, 2014, 34(8): 2238
Received: Sep. 16, 2013
Accepted: --
Published Online: Aug. 18, 2014
The Author Email: Yong ZHANG (chauchylan@163.com)