Acta Optica Sinica, Volume. 15, Issue 1, 112(1995)
An Atomic Force Microscope
An atomic force microscope based on the optical level detection method hasbeen developed and atomic resolution is achieved. The scanning range is 7 Urn × 7 μm.images of mica. optical grating and compact stamper are shown. In this paper thetheory,construunction and experiment results are described.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. An Atomic Force Microscope[J]. Acta Optica Sinica, 1995, 15(1): 112