Acta Optica Sinica, Volume. 4, Issue 12, 1067(1984)

Determination of spatial linewidth with partially coherent imagery

YANG JIAN, WU SHUDONG, and WANG ZHIJIANG
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    In this paper, the straight-edge-threshold in an axis-symmetrical imaging system is deduced based on the theory of partial coherence, and the effect of the scanning slit width is also considered. An experimental method is discussed with a π phase edge plate. The comparison of the calculated value and the threshold shows a good agreement. The location accuracy reaches to 0.01μm.

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    YANG JIAN, WU SHUDONG, WANG ZHIJIANG. Determination of spatial linewidth with partially coherent imagery[J]. Acta Optica Sinica, 1984, 4(12): 1067

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    Paper Information

    Category: Diffraction and Gratings

    Received: Dec. 16, 1983

    Accepted: --

    Published Online: Sep. 15, 2011

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