Acta Optica Sinica, Volume. 15, Issue 2, 252(1995)
Fabrication of SiGe Rib Waveguides X Branches
Based on the realization of low loss Si1-xGex/Si single-mode rib waveguides,we developed the Si1-xGex/Si "X" branches with the cross waveguides. These structures were fabricated from SiGe grown by molecular beam epitaxy (MBE). The branchesdemensions are determined by Si1-xGex/Si large single-mode conditions and propagationfeatures of the "X" cross waveguides using the beam propagstion and effective indexmethod.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of SiGe Rib Waveguides X Branches[J]. Acta Optica Sinica, 1995, 15(2): 252