Acta Optica Sinica, Volume. 19, Issue 2, 254(1999)
Design and Fabrication of 2-Dimension Laser Scanner Using Diffractive Optical Elements
A new kind of diffractive 2-dimension laser scanner is proposed, designed and fabricated using laser direct writing (LDW) and reactive ion etched (RIE). The scanner is tested and the parameters of the 25×25 degrees scanning range and 41% diffractive efficiency are obtained.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and Fabrication of 2-Dimension Laser Scanner Using Diffractive Optical Elements[J]. Acta Optica Sinica, 1999, 19(2): 254
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