Infrared and Laser Engineering, Volume. 37, Issue 1, 119(2008)
Improving diffraction efficiency of DOE in wide waveband application by multilayer micro-structure
作者简介:沈亦兵(1961-)男,浙江杭州人,教授,博士生作者,博士,主要从事微光学、光刻技术等的研究.Email:edeoco@moi-lab2.zju.edu.cn
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[in Chinese], [in Chinese], [in Chinese]. Improving diffraction efficiency of DOE in wide waveband application by multilayer micro-structure[J]. Infrared and Laser Engineering, 2008, 37(1): 119