Chinese Journal of Lasers, Volume. 27, Issue 3, 219(2000)
Measurement of Stair-like Surfaces’ Topography by Data-processing
The reason why the measuring results are probably wrong when measuring the topography of stair-like surfaces is analyzed, and the new data processing method is presented, which can be applied to correct the measuring results of stair-like surfaces’ topography. The method has been successfully used in the system for measuring the 3-D surface topography of diffractive optical elements.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement of Stair-like Surfaces’ Topography by Data-processing[J]. Chinese Journal of Lasers, 2000, 27(3): 219
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