Chinese Journal of Lasers, Volume. 40, Issue s1, 103009(2013)

Investigation on 532 nm Picosecond Laser Processing of Quartz Glass

Hu Yan*, Ji Lingfei, Li Jian, Bao Yong, Yan Yinzhou, and Jiang Yijian
Author Affiliations
  • [in Chinese]
  • show less

    In this paper, picosecond laser drilling of quartz glass is studied. The 532 nm picosecond laser induced ablation threshold of quartz glass is explored and the basic parameters of the picosecond laser processing of glass, including the laser power, repetition rate and processing time, are investigated. From the study, the ablation threshold of quartz glass at picosecond pulse width is concluded to be around 2.01 J/cm2. It is found that the diameter and depth of the holes drilled in quartz glass are proportional to the laser fluence and processing time, but the rate of increase levels off finally. Meanwhile the laser repetition rate also has an important influence on the machining quality. Picosecond laser crack-free processing of quartz glass is achieved by optimizing the laser parameters based on the ablation threshold and the processing rules obtained in our research.

    Tools

    Get Citation

    Copy Citation Text

    Hu Yan, Ji Lingfei, Li Jian, Bao Yong, Yan Yinzhou, Jiang Yijian. Investigation on 532 nm Picosecond Laser Processing of Quartz Glass[J]. Chinese Journal of Lasers, 2013, 40(s1): 103009

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: laser manufacturing

    Received: Jul. 1, 2013

    Accepted: --

    Published Online: Dec. 24, 2013

    The Author Email: Yan Hu (huyan0508@emails.bjut.edu.cn)

    DOI:10.3788/cjl201340.s103009

    Topics