Acta Optica Sinica, Volume. 24, Issue 3, 364(2004)
A Novel Variable Optical Attenuator Based on Micro-Electromechanical System (MEMS)
A novel variable optical attenuator based on micro-electromechanical system is reported. The variable optical attenuator employs a low-cost simple structure design, capable of fast dynamic response (<2 ms), wide dynamic range (0~35 dB), low return loss (<-50 dB) and wide bandwidth. By utilizing precise electrical-discharge machining as an enabling technology, the design incorporates an electro-magnetically actuated silicon mirror rotating around a 100 m shaft and a miniature driven coil. The attenuation response is compared with the calculated result from a numerical theoretical model by using ANSYS, a finite element analysis software package, and a reasonably good agreement was obtained. The variable optical attenuator is scalable to a discrete array to implement dense wavelength division multiplexing channel equalization in various networking devices.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A Novel Variable Optical Attenuator Based on Micro-Electromechanical System (MEMS)[J]. Acta Optica Sinica, 2004, 24(3): 364