Acta Optica Sinica, Volume. 31, Issue 12, 1222005(2011)

Simulation and Fabracation of Multi-Micromirrors Used in Infrared Spectrometer

Zheng Ying1,2、*, Liang Zhongzhu1, and Liang Jingqiu1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    With the modernized development of environmental science, weather observation and space detection and so on, it is an urgent requirement to carry out the research of portable and real-time supervised Fourier transform spectroscope in the leading basic research. A new micro-spaced modulated Fourier transform infrared spectroscope is proposed, without moving parts in this configuration. Thereinto, two multi-micromirrors are the key components in the interferometric system. The effect on the recovery spectra of the height of steps and the roughness of reflective surfaces in multi-micromirrors is simulated, and the height error of steps that can be tolerated by the system is ±0.18 μm, and the biggest roughness is settled at 150 and 200 nm. The multi-micromirror is fabricated by lithography-electroplating. The test result of the roughness of the reflectives surfaces of the multi-micro mirror (RMS) is 90.23 nm, and the height error of steps is ±0.1 μm, which meet the requirement of the design.

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    Zheng Ying, Liang Zhongzhu, Liang Jingqiu. Simulation and Fabracation of Multi-Micromirrors Used in Infrared Spectrometer[J]. Acta Optica Sinica, 2011, 31(12): 1222005

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Apr. 22, 2011

    Accepted: --

    Published Online: Nov. 21, 2011

    The Author Email: Ying Zheng (optics_zhy@yahoo.cn)

    DOI:10.3788/aos201131.1222005

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