Acta Optica Sinica, Volume. 31, Issue 12, 1222005(2011)
Simulation and Fabracation of Multi-Micromirrors Used in Infrared Spectrometer
With the modernized development of environmental science, weather observation and space detection and so on, it is an urgent requirement to carry out the research of portable and real-time supervised Fourier transform spectroscope in the leading basic research. A new micro-spaced modulated Fourier transform infrared spectroscope is proposed, without moving parts in this configuration. Thereinto, two multi-micromirrors are the key components in the interferometric system. The effect on the recovery spectra of the height of steps and the roughness of reflective surfaces in multi-micromirrors is simulated, and the height error of steps that can be tolerated by the system is ±0.18 μm, and the biggest roughness is settled at 150 and 200 nm. The multi-micromirror is fabricated by lithography-electroplating. The test result of the roughness of the reflectives surfaces of the multi-micro mirror (RMS) is 90.23 nm, and the height error of steps is ±0.1 μm, which meet the requirement of the design.
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Zheng Ying, Liang Zhongzhu, Liang Jingqiu. Simulation and Fabracation of Multi-Micromirrors Used in Infrared Spectrometer[J]. Acta Optica Sinica, 2011, 31(12): 1222005
Category: Optical Design and Fabrication
Received: Apr. 22, 2011
Accepted: --
Published Online: Nov. 21, 2011
The Author Email: Ying Zheng (optics_zhy@yahoo.cn)