Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312018(2023)
Research on Reflective Two-Dimensional Grating Measurement System
Aiming at the requirement of two-dimensional sub-micron precision synchronous measurement for ultra-precision motion stage, a reflective two-dimensional grating measurement system is proposed and established. The synchronous measurement method of plane displacement of reflective two-dimensional grating is investigated, and an error transfer model of reflective two-dimensional grating measurement system is established. Through Vold-Kalman filtering algorithm, the high-order harmonic error and amplitude/phase error in the grating signal are corrected and filtered in real time. An arc-tangent subdivision algorithm and period measurement method are used to measure the frequency of the orthogonal pulse of the grating to realize the high-resolution measurement and real-time speed measurement. A reflective two-dimensional grating measurement system with sub-micron measurement accuracy is constructed, in the measurement range of 500 mm×500 mm, the positioning accuracy of the x-direction and y-direction is ±0.3 μm and the resolution is 0.005 μm.
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Hongzhong Liu, Yongsheng Shi, Lei Yin, Bangdao Chen, Biao Lei, Weitao Jiang, Dong Niu, Lanlan Wang, Wei Jiang, Guojun Li, Jinju Chen. Research on Reflective Two-Dimensional Grating Measurement System[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312018
Category: Instrumentation, Measurement and Metrology
Received: Oct. 20, 2022
Accepted: Dec. 5, 2022
Published Online: Feb. 14, 2023
The Author Email: Liu Hongzhong (hzliu@mail.xjtu.edu.cn)