Acta Optica Sinica, Volume. 34, Issue 6, 628001(2014)
A Novel Fabry-Perot Micro-displacement Sensor Based on Intensity Demodulation Method
According to the first harmonic cavity-length locking technology, a novel kind of micro-displacement sensor, which combines F-P interferometer and intensity demodulation method, has been developed. The initial length of the F-P cavity has been actively scanned and dynamically locked. And then the change of the F-P cavity-length induced by the motion of the target is coded on the variation of the optical output power of the cavity. As a consequence, a fast and direct micro-displacement sensing scheme through the intensity demodulation is available.The theoretical model of the displacement sensor and the technical scheme for actively locking the initial length of the F-P cavity through the first harmonic have been demonstrated in detail, respectively. Micro-displacement experiments provided by a commercial high-precision PZT with different vibrating parameters have been performed, and the experimental results agree well with the motion of the PZT within peak-to-peak amplitude of λ/4 and frequency is no more than 400 Hz. The frequency error is less than 0.5 Hz, and the total measurement accuracy is less than 1 nm.
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Li Chuncheng, Wang Ming, Xia Wei, Liu Qiang, Hao Hui. A Novel Fabry-Perot Micro-displacement Sensor Based on Intensity Demodulation Method[J]. Acta Optica Sinica, 2014, 34(6): 628001
Category: Remote Sensing and Sensors
Received: Dec. 14, 2013
Accepted: --
Published Online: May. 26, 2014
The Author Email: Chuncheng Li (lcc2yn@hotmail.com)