Optical Instruments, Volume. 42, Issue 4, 75(2020)

A heterodyne interferometry for simultaneous measurement of four degrees of freedom

Shanting ZHANG and Hanming GUO*
Author Affiliations
  • School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • show less

    Aiming at the problems of limited measurement range, low accuracy and Abbe error in multi-degree-of-freedom measurement technology, a large-travel, high-precision, traceable, four- degree-of-freedom simultaneous measurement of heterodyne interferometry was proposed. The miniaturized 532 nm solid-state laser with iodine frequency stability was used, and the optical fiber coupling technology was used to spatially separate the dual-frequency light. Differential wavefront sensing technology realized the simultaneous detection of displacement, pitch and yaw, and wedge prisms are used to measure the change in straightness. The measuring instrument can suppress the non-linear error caused by dual-frequency optical aliasing, and realize the measurement with a travel range of 6 m, a displacement resolution of 0.13 nm, a pitch and yaw angle resolution of 0.026 μrad, and a straightness resolution of 14.88 nm. The measurement results are traceable.

    Tools

    Get Citation

    Copy Citation Text

    Shanting ZHANG, Hanming GUO. A heterodyne interferometry for simultaneous measurement of four degrees of freedom[J]. Optical Instruments, 2020, 42(4): 75

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: INSTRUMENTS

    Received: Mar. 7, 2020

    Accepted: --

    Published Online: Jan. 6, 2021

    The Author Email: GUO Hanming (hmguo@usst.edu.cn)

    DOI:10.3969/j.issn.1005-5630.2020.04.012

    Topics