Optical Instruments, Volume. 42, Issue 4, 75(2020)
A heterodyne interferometry for simultaneous measurement of four degrees of freedom
Aiming at the problems of limited measurement range, low accuracy and Abbe error in multi-degree-of-freedom measurement technology, a large-travel, high-precision, traceable, four- degree-of-freedom simultaneous measurement of heterodyne interferometry was proposed. The miniaturized 532 nm solid-state laser with iodine frequency stability was used, and the optical fiber coupling technology was used to spatially separate the dual-frequency light. Differential wavefront sensing technology realized the simultaneous detection of displacement, pitch and yaw, and wedge prisms are used to measure the change in straightness. The measuring instrument can suppress the non-linear error caused by dual-frequency optical aliasing, and realize the measurement with a travel range of 6 m, a displacement resolution of 0.13 nm, a pitch and yaw angle resolution of 0.026 μrad, and a straightness resolution of 14.88 nm. The measurement results are traceable.
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Shanting ZHANG, Hanming GUO. A heterodyne interferometry for simultaneous measurement of four degrees of freedom[J]. Optical Instruments, 2020, 42(4): 75
Category: INSTRUMENTS
Received: Mar. 7, 2020
Accepted: --
Published Online: Jan. 6, 2021
The Author Email: GUO Hanming (hmguo@usst.edu.cn)