Acta Photonica Sinica, Volume. 43, Issue 2, 213004(2014)
Electromagnetically Induced Transparency-like Effect in the Optimized Silicon Micro Ring Resonators
To realize the electromagnetically induced transparency-like effect on the silicon waveguide, a double ring resonators structure based on silicon-on-insulator was designed and fabricated. By post processing of thermal oxidation annealing under the temperature from 300 ℃ to 1 200 ℃, wet chemical etching with buffered oxide etch and N2 annealing under the temperature of 1 000 ℃, the electromagnetically induced transparency-like curve via the vertical grating coupling method was observed. The effect of different distance between the two resonators to the electromagnetically induced transparency-like curve was analyzed. The Q factor of a single ring in this fabrication was 5.1×104. The measured spectral width of the transparency window was as narrow as 500 MHz.
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WANG Yong-hua, WEI Li-ping, ZANG Jun-bin, CUI Dan-feng, LI Yan-na, LIU Yao-ying, XUE Chen-yang. Electromagnetically Induced Transparency-like Effect in the Optimized Silicon Micro Ring Resonators[J]. Acta Photonica Sinica, 2014, 43(2): 213004
Received: Oct. 24, 2013
Accepted: --
Published Online: Feb. 18, 2014
The Author Email: Yong-hua WANG (huazaisss@foxmail.com)