Acta Optica Sinica, Volume. 19, Issue 9, 1374(1999)

Study on a Dual-Wavelength Absolute Distance Heterodyne Interferometer

[in Chinese]1, [in Chinese]2, and [in Chinese]1
Author Affiliations
  • 1[in Chinese]
  • 2Calimetrics Inc, 815 Atlantic Avenue Suite 105, Alameda, CA 94501-2274, U.S.A.
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    An absolute distance heterodyne interferometer using a dual-longitudinal mode He-Ne laser is proposed. In this interferometer an optical heterodyne technique is used to enhance the signal/noise ratio of its opto-electrical signals. By measuring the phase difference between these two heterodyne signals, the fractional fringe of the synthetic wavelength is measured precisely and directly. Also the influence on the measuring accuracy from the mode coupling is analyzed. The compensation for this error is discussed. An accuracy of 140 μm in 25 m is obtained.

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    [in Chinese], [in Chinese], [in Chinese]. Study on a Dual-Wavelength Absolute Distance Heterodyne Interferometer[J]. Acta Optica Sinica, 1999, 19(9): 1374

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 10, 1997

    Accepted: --

    Published Online: Aug. 9, 2006

    The Author Email:

    DOI:

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