High quality ceramic targets is crucial to produce BaBiO3-based negative temperature coefficient (NTC) thermosensitive films via RF magnetron sputtering. In this paper, the shrinkage, flatness and volume density of pure BaBiO3 target were measured, and the orthogonal experiment was designed via changing the major factors (i.e., compressive time, sintering temperature, holding time and heating rate), and the structure-activity relationship between each factor and the target material quality index was analyzed. Also, based on the influence of sintering behaviors on the grain growth of BaBiO3 ceramic targets, the key sintering process factors such as sintering temperature, holding time and heating rate were regulated by the phenomenological equation and intercept method to discuss the intrinsic relationship among the grain growth mechanism, growth index n and key influencing factors. According to the results by X-ray diffraction, Raman spectroscopy and scanning electron microscopy-enery dispersive spectroscopy, the phase structure and elemental composition of the target samples obtained at the given process factors were analyzed. The results show that BaBiO3 ceramic targets with slight deformation, high density and good apparent quality can be obtained under the optimum conditions (i.e., compressive time of 12 min, sintering temperature of 750 ℃, holding time of 120 min and heating rate of 2 ℃/min).