International Journal of Extreme Manufacturing, Volume. 5, Issue 4, 43001(2023)

Material manufacturing from atomic layer

[in Chinese]1,*... [in Chinese]2 and [in Chinese]3 |Show fewer author(s)
Author Affiliations
  • 1School of Advanced Materials, Shenzhen Graduate School, Peking University, Shenzhen 518055, People’s Republic of China
  • 2School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430070, People’s Republic of China
  • 3Institut National de la Recherche Scientifique (INRS), Centre ′Energie Matériaux Télécommunications, Varennes, Québec J3X 1P7, Canada
  • show less

    Atomic scale engineering of materials and interfaces has become increasingly important in material manufacturing. Atomic layer deposition (ALD) is a technology that can offer many unique properties to achieve atomic-scale material manufacturing controllability. Herein, we discuss this ALD technology for its applications, attributes, technology status and challenges. We envision that the ALD technology will continue making significant contributions to various industries and technologies in the coming years.

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese]. Material manufacturing from atomic layer[J]. International Journal of Extreme Manufacturing, 2023, 5(4): 43001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: --

    Accepted: --

    Published Online: Jul. 24, 2024

    The Author Email: (wangxw@pkusz.edu.cn)

    DOI:10.1088/2631-7990/acf3b8

    Topics