International Journal of Extreme Manufacturing, Volume. 5, Issue 4, 43001(2023)
Material manufacturing from atomic layer
Atomic scale engineering of materials and interfaces has become increasingly important in material manufacturing. Atomic layer deposition (ALD) is a technology that can offer many unique properties to achieve atomic-scale material manufacturing controllability. Herein, we discuss this ALD technology for its applications, attributes, technology status and challenges. We envision that the ALD technology will continue making significant contributions to various industries and technologies in the coming years.
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[in Chinese], [in Chinese], [in Chinese]. Material manufacturing from atomic layer[J]. International Journal of Extreme Manufacturing, 2023, 5(4): 43001
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Published Online: Jul. 24, 2024
The Author Email: (wangxw@pkusz.edu.cn)