Ellipcometric measurement of biaxial single crystal films on biaxial crystal substrats

SHI LUPING; JIANG MINHUA; SHAO ZHONGSHU; LIU YAOGANG; WANG JITANG

Acta Optica Sinica, Volume. 9, Issue 11, 1033(1989)

SHI LUPING, JIANG MINHUA, SHAO ZHONGSHU, LIU YAOGANG, and WANG JITANG

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[in Chinese]

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This paper presnts two kinds of methods for measuring the biaxial single crystal films on the biaxial crystal substroats. We have used such methods to measure the thickness and refractive index of the film layer of KTP waveguide.

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biaxial crystal ellipsometrio measurement ludioatrix

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SHI LUPING, JIANG MINHUA, SHAO ZHONGSHU, LIU YAOGANG, WANG JITANG. Ellipcometric measurement of biaxial single crystal films on biaxial crystal substrats[J]. Acta Optica Sinica, 1989, 9(11): 1033

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Paper Information

Category: Thin Films

Received: Dec. 17, 1988

Accepted: --

Published Online: Sep. 20, 2011

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Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology