Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312016(2023)

Laser Interferometer Technology and Instruments for Sub-Nanometer and Picometer Displacement Measurements

Xionglei Lin1,2, Xiaobo Su1,2, Jianing Wang1,2, Yunke Sun1,2, and Pengcheng Hu1,2、*
Author Affiliations
  • 1Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, Heilongjiang, China
  • 2Key Laboratory of Ultra-Precision Intelligent Instrumentation, Ministry of Industry and Information Technology, Harbin 150080, Heilongjiang, China
  • show less

    Laser interference displacement measurement technology has become a fundamental one for the current and next-generation high-end equipment and ultra-precision metrology due to its large range, high resolution, noncontact, and traceability. Based on a brief introduction of various existing sub-nanometer laser interferometers, in this study, we review the research results of sub-nanometer- and picometer-level laser interference displacement measurement technology from the aspects of precision, accuracy, and speed. First, starting from the principle of laser interferometer, the main errors and technical difficulties that limit the improvement of resolution and speed of displacement measurements are analyzed. Second, the major technological breakthroughs made in recent years in laser high-precision frequency stabilization, high-precision interferometric mirrors, high-speed/high-resolution phase subdivision technology, and environmental compensation and control are highlighted. Finally, the development trends of the next-generation ultra-precision laser interference displacement measurement technology is summarized and prospected.

    Tools

    Get Citation

    Copy Citation Text

    Xionglei Lin, Xiaobo Su, Jianing Wang, Yunke Sun, Pengcheng Hu. Laser Interferometer Technology and Instruments for Sub-Nanometer and Picometer Displacement Measurements[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312016

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jan. 3, 2023

    Accepted: Jan. 17, 2023

    Published Online: Feb. 28, 2023

    The Author Email: Hu Pengcheng (hupc@hit.edu.cn)

    DOI:10.3788/LOP230440

    Topics