Acta Photonica Sinica, Volume. 44, Issue 5, 531001(2015)

Determination of Optical Constants and Thickness of Online Low-E Glass in Visible-near Infrared Region by Ellipsometry

JI Bei*... HUANG Shui-ping and ZHOU Jun |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less

    Based on the optical mechanism of online Low-E glass,the optical constants of functional layer and transition layer of online Low-E glass in visible-near infrared region were analyzed by the spectroscopic ellipsometry.The ellipsometric data of the sample at three different angles of incidence were measured at first,then the Lorentz two-oscillator model and Cauchy model were used to characterize the dispersion characteristics of functional layer and transition layer of online Low-E glass ,respectively.The optical constants and the thickness of each layer of online Low-E glass were obtained by fitting the measured ellipsometric data.Moreover,the Scanning Electron Microscope (SEM) were used to investigate the film thickness of the sample.The fitting results suggest that Lorentz two-oscillator model and Cauchy model can explain the optical properties of online Low-E glass well.Meanwhile,the ellipsometry also provides a reliable method for the determination of optical constants and thickness of the multilayer film systems.

    Tools

    Get Citation

    Copy Citation Text

    JI Bei, HUANG Shui-ping, ZHOU Jun. Determination of Optical Constants and Thickness of Online Low-E Glass in Visible-near Infrared Region by Ellipsometry[J]. Acta Photonica Sinica, 2015, 44(5): 531001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Aug. 6, 2014

    Accepted: --

    Published Online: May. 26, 2015

    The Author Email: Bei JI (jibei0314@163.com)

    DOI:10.3788/gzxb20154405.0531001

    Topics