Chinese Journal of Quantum Electronics, Volume. 19, Issue 1, 21(2002)

Development of a Microcomputer Controlling System for High Power Excimer Laser

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    This paper describes the design of a microcomputer controlling system for high power excimer Iaser, which is suitable for the measurement of characteristics of excimer laser when it works normally This device has the features of easy to operate, low cost and small error. Measurements show that the device is stable and practicable.

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    [in Chinese], [in Chinese], [in Chinese]. Development of a Microcomputer Controlling System for High Power Excimer Laser[J]. Chinese Journal of Quantum Electronics, 2002, 19(1): 21

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    Paper Information

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    Received: Oct. 24, 2000

    Accepted: --

    Published Online: May. 15, 2006

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