Frontiers of Optoelectronics, Volume. 5, Issue 1, 41(2012)

Ge-on-Si for Si-based integrated materials and photonic devices

Weixuan HU, Buwen CHENG*, Chunlai XUE, Shaojian SU, Haiyun XUE, Yuhua ZUO, and Qiming WANG
Author Affiliations
  • State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
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    This paper reviews the recent progress in photonic devices application of Ge-on-Si. Ge-on-Si materials and optical devices are suitable candidates for Si-based optoelectronic integration because of the mature epitaxial technique and the compatibility with Si complementary metal-oxide-semiconductor (CMOS) technology. Recently, the realities of electric-pump Ge light emitting diode (LED) and optical-pump pulse Ge laser, Ge quantum well modulator based on quantum Stark confined effect, waveguide Ge modulator based on Franz-Keldysh (FK) effect, and high performance near-infrared Ge detector, rendered the Si-based optoelectronic integration using Ge photonic devices. Ge-on-Si material is also an important platform to grow other materials on it for Sibased optoelectronic integration. InGaAs and GeSn have been grown on the Ge-on-Si. InGaAs LED and GeSn photodetector have been successfully fabricated as well.

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    Weixuan HU, Buwen CHENG, Chunlai XUE, Shaojian SU, Haiyun XUE, Yuhua ZUO, Qiming WANG. Ge-on-Si for Si-based integrated materials and photonic devices[J]. Frontiers of Optoelectronics, 2012, 5(1): 41

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    Paper Information

    Received: Sep. 30, 2011

    Accepted: Nov. 15, 2011

    Published Online: Sep. 10, 2012

    The Author Email: CHENG Buwen (cbw@semi.ac.cn)

    DOI:10.1007/s12200-012-0200-2

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