Acta Optica Sinica, Volume. 7, Issue 1, 87(1987)
The near infra-red confocal scanning interferometer
In this paper, the scanning interferometer with confocal spherical cavity structure is described, which is operated round 0.85μm and 1.3μm respectively. The free spectral range of the interferometer is 4.3GHz, and the higest resolution is 36MHz (finesse is about 120).
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YUAN SHUZONG. The near infra-red confocal scanning interferometer[J]. Acta Optica Sinica, 1987, 7(1): 87