Acta Optica Sinica, Volume. 35, Issue 4, 412004(2015)
Research on Phase-Shifting Characteristic of Retarder Array in Simultaneous Phase-Shifting Interferometer
To study the phase- shifting characteristic of retarder array in simultaneous phase- shifting interferometry, the relationship between phase shift and fast-axis azimuth error is deduced through Jones vector and Jones matrix, and the error propagation formula is given. A spherical mirror is measured by simultaneous phaseshifting interferometer based on retarder array without calibrating fast-axis azimuth accurately and Zygo GPI XP interferometer, the difference of root-mean-square and peak-to-valley are 0.003l and 0.033l respectively. The influence of azimuth error tolerance and phase shift error of retarder array and optical axis azimuth error of polarizer is discussed.
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Zheng Donghui, Chen Lei, Li Bo, Li Jinpeng, Wulan Tuya. Research on Phase-Shifting Characteristic of Retarder Array in Simultaneous Phase-Shifting Interferometer[J]. Acta Optica Sinica, 2015, 35(4): 412004
Category: Instrumentation, Measurement and Metrology
Received: Oct. 12, 2014
Accepted: --
Published Online: Apr. 3, 2015
The Author Email: Donghui Zheng (zdonghui_njust@163.com)