Acta Optica Sinica, Volume. 36, Issue 7, 731001(2016)
Design and Fabrication: Phase Modulated Antireflection Coatings in 0.55~0.85 μm Waveband
In the waveband of 0.55~0.85 μm, how to modulate the phases while ensuring high transmittance of thin films is the key technology of multiple polarization imaging module project. Phase modulated antireflection coatings has been designed and fabricated on the substrate H-LaK4L(optical glass) by utilizing asymmetry equivalent layers theory and using three types of oxide coating materials: Ta2O5、Al2O3、SiO2. After process optimization, in the waveband of 0.55~0.85 μm and with the incidence angle of 28°, the results indicate that the average transmittance is greater than 97% while phase difference is less than 1°. The coatings can pass the environmental test required for space optical thin film products, and meet the reliability requirement of the project.
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Li Daqi, Yu Tianyan, Chen Gang, Liu Baojian, Yu Deming, Duan Weibo, Liu Dingquan. Design and Fabrication: Phase Modulated Antireflection Coatings in 0.55~0.85 μm Waveband[J]. Acta Optica Sinica, 2016, 36(7): 731001
Category: Thin Films
Received: Feb. 24, 2016
Accepted: --
Published Online: Jul. 8, 2016
The Author Email: Daqi Li (lidaqi@mail.sitp.ac.cn)