Acta Photonica Sinica, Volume. 35, Issue 10, 1505(2006)

A Micromachining Based Miniature Variable Optical Attenuator

Wan Peng1、*, Yuan Ye2, and Wu Xingkun1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    A novel design of micro-machined variable optical attenuator (VOA) with a packaged size as small as 25 × 10 × 7 mm3 is presented. Attenuation was introduced by a rotatable miniature silicon mirror,with its orientation finely adjusted through the balance between a pair of electromagnetic forces. The design is free of conventional spring restoring force for attenuation reset and therefore ensures a high stability. The realizing structure was fabricated by EDM micro-machining as well as laser spot welding. VOA prototypes exhibit a wide attenuation range of 40 dB with an insertion loss of 0.8 dB and backreflection of -50 dB. The measured result was compared with that of an FEA model using ANSYS software package and a good agreement was obtained. The VOA can be arrayed for effective signal balancing and device protection in WDM/DWDM network systems.

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    Wan Peng, Yuan Ye, Wu Xingkun. A Micromachining Based Miniature Variable Optical Attenuator[J]. Acta Photonica Sinica, 2006, 35(10): 1505

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    Paper Information

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    Received: Jun. 25, 2005

    Accepted: --

    Published Online: Jun. 3, 2010

    The Author Email: Peng Wan (wanpeng@zju.edu.cn)

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