An application of Laser Scanning Confocal Microscope (LSCM) in micro-structure analysis was discussed in order to enhance the analyzing and measuring levels of micro structure.LSCM could be used to measure large angle because of its high resolution and adjustable light intensity,and could analyze the micro structure by combining with picture disposal system qualitatively and quantitatively,also its full-automatic sample stand could automatically scan along X axis and Y axis to realize a picture mosaic.The experimental results indicate that the maximum slope angle measured by LSCM reaches at least 50°,and the clear three dimensional profile is obtained in the profile analysis of cantilever.Meanwhile,the deformation accurately measured by two dimensional quantitative analysis is 3.145 μm,and the field area is 384 μm×288 μm in mosaic function equipped with LSCM in 100× objective,which can solve the problem that the watched object's total shape in single frame micrographic image can not be obtained under high microscopic enlargement times.Experimental results show that the LSCM can make up for measuring functional deficiency of other profile analytic equipment and can improve the testing level of MEMS.