Laser & Optoelectronics Progress, Volume. 52, Issue 10, 100005(2015)

Progress in Fabrication and Application of Doping Black Silicon by Femtosecond Laser

Du Lingyan1,2、*, Wu Zhiming1, Hu Zhen1, and Jiang Yadong1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less

    The research progress of fabrication and application of doping black silicon via femtosecond laser irradiation is reviewed. The formation mechanism of micro-nano structures of silicon surfaces and impurity band in black silicon is introduced, and the influence factors in fabrication process of black silicon is analyzed, elaborating that super saturated doping can be realized by introducing chalcogen dopant (sulfur, selenium, tellurium) in the background gas, liquid, solid thin film environments, or ion-implantation followed by irradiation with femtosecond laser. Some problems demanded to be solved are suggested, and the application prospects of doping black silicon are predicted.

    Tools

    Get Citation

    Copy Citation Text

    Du Lingyan, Wu Zhiming, Hu Zhen, Jiang Yadong. Progress in Fabrication and Application of Doping Black Silicon by Femtosecond Laser[J]. Laser & Optoelectronics Progress, 2015, 52(10): 100005

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Reviews

    Received: May. 5, 2015

    Accepted: --

    Published Online: Oct. 8, 2015

    The Author Email: Lingyan Du (dulingyan927@163.com)

    DOI:10.3788/lop52.100005

    Topics