Using nanosphere lithography and magnetron sputtering technique, ordered ZnO nanoparticle arrays are fabricated on normal glass substrates. The surface morphology under scanning electron microscope (SEM) is observed. The fluorescence (PL) spectra of samples is tested. The result shows that comparing with the ordinary ZnO thin film, the structure of ordered ZnO nanoparticle arrays improves the luminescent properties in the ultraviolet region and reduces the defects of blue-green light emission. The influences of different heights of ZnO nanoparticle arrays and different sizes of colloidal spheres masking on luminescence properties of ordered ZnO nanoparticle array samples are studied. The quality of ordered nanoparticle array samples are good at the condition of 30 min sputtering time. The absorption spectra and fluorescence spectra exhibit a blue shift as the size of polystyrene (PS) nanoparticle decreases.