Journal of Applied Optics, Volume. 40, Issue 3, 429(2019)

Research on HgCdTe focal plane arrays for ultra-spectrum detection in Vis/NIR

ZHANG Shan1, SHEN Yiming1, LIU Dan1, ZHONG Yanhong1, WEI Yanfeng1, LIAO Qingjun1, CHEN Honglei1, LIN Chun1,2, DING Ruijun1, and HE Li1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    To meet the requirement of high-resolution and high-sensitivity observation in visible-near infrared, the HgCdTe focal plane arrays(FPAs) with high signal-to-noise ratio was fabricated based on the large-array low-noise HgCdTe detector manufacture technology and low-damage substrate removal technology. The response of short-wave infrared detector was extended to 400 nm~2 600 nm by the ZnCdTe substrate removed with mechanical thinning and chemical wet etching technology. After the fabrication of the Vis/NIR 640×512 pixel 25 m FPAs, the performance was evaluated with a certain quantity of radiation. The results indicate that the quantum efficiency is approximately 88.4% at 2.32 μm waveband, the effective pixel rate is 98% and the signal-to-noise ratio is 287, the clear imaging quality in Vis/NIR waveband can be obtained.

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    ZHANG Shan, SHEN Yiming, LIU Dan, ZHONG Yanhong, WEI Yanfeng, LIAO Qingjun, CHEN Honglei, LIN Chun, DING Ruijun, HE Li. Research on HgCdTe focal plane arrays for ultra-spectrum detection in Vis/NIR[J]. Journal of Applied Optics, 2019, 40(3): 429

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    Paper Information

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    Received: Oct. 25, 2018

    Accepted: --

    Published Online: Jun. 10, 2019

    The Author Email:

    DOI:10.5768/jao201940.0202004

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