Acta Optica Sinica, Volume. 4, Issue 2, 154(1984)
Parallelism measurement for opaque object based on the principle of spherical-wave interference
A technique for measuring the parallelism of opaque object based on the principle of spherical wave interference is discussed. The equipment is very simple, but the precision is high enough. The apparatus can be used under the condition of common production workshop.
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LU KECHENG. Parallelism measurement for opaque object based on the principle of spherical-wave interference[J]. Acta Optica Sinica, 1984, 4(2): 154
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