Laser & Optoelectronics Progress, Volume. 58, Issue 8, 0811004(2021)
Design of Wavelength-Variable Standard Spherical Lens in Fizeau Interferometer
The standard spherical lens mounted in the Fizeau laser interferometer can usually be used only at a specific wavelength. This paper presents a method to change the working length of the standard spherical lens by adjusting the lens interval inside it, and two types of wavelength-variable standard spherical lenses are designed by using this method, in which the caliber is 19.05 mm and the aperture coefficients are 5.6 and 8, respectively. The reference wavefront quality of the standard spherical lens at each target wavelength meets the design requirements. The tolerance is analyzed to ensure that the standard spherical lens possesses practical machinability. The mechanical structure is designed according to the assembly and working principle of the wavelength-variable standard spherical lens and an experimental standard spherical lens with aperture coefficient of 8 is developed. The peak-valley(PV) value of the transmitted wavefront under a standard 632.8 nm laser interferometer is less than λ/10(λ, incident wavelength) and the actual processing error of the lens is within the tolerance range. The multi-wavelength laser interference device and the experimental standard spherical lens are used to measure the surface shape of the same spherical element. The measurement results under five wavelengths are basically the same. The experimental results show that the wavelength-variable standard spherical lens can be used for actual detection. The research and development of this kind of wavelength-variable standard spherical lens can save inspection costs, improve the utilization rate of standard lenses in laser interferometry, and it has high engineering application value.
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Yan Wang, Qiyuan Zhang, Quanzhao Wang, Qiubai Chen, Fang Wang, Shuai Xu, Sen Han. Design of Wavelength-Variable Standard Spherical Lens in Fizeau Interferometer[J]. Laser & Optoelectronics Progress, 2021, 58(8): 0811004
Category: Imaging Systems
Received: Sep. 2, 2020
Accepted: Sep. 14, 2020
Published Online: Apr. 16, 2021
The Author Email: Han Sen (senhanemail@126.com)