Optics and Precision Engineering, Volume. 23, Issue 10, 2860(2015)
Design and experiments of micro motion platform based on a pair of flexible parallel six-bar linkages
A micro motion platform with a pair of flexible parallel six-bar linkages and larger bearing capacity was designed based on a right circular flexure hinge and its performance was tested. The rotational stiffness of the right circular flexure hinge was calculated by classical stiffness equation, then the stiffness equation of the platform with a pair of flexible parallel six-bar linkages in a motion direction was deduced. The dynamic model of the platform was established with Lagrange equation, and the analytical formula of natural frequency of the platform was deduced. The micro motion platform was designed and optimized and the parameters of the flexure hinge were optimized based on the static and dynamic characteristics. A test system for static and dynamic characteristics of the micro motion platform was established based on a laser interferometer and a laser Doppler vibrometer. The test results show that the error of stiffness is 6.5% between the theoretical value 7.92 N/μm and the experiment value 7.44 N/μm, and the error of nature frequency is 2.3% between the theoretical value 349.9 Hz and the experiment value 342.2 Hz. The displacements under no-load and the loading of 250, 500, 2 000, 2 250, 2 500 g indicate that the uneven loading has larger influence on the displacement of the platform. When the loading is 2 500 g, the effect by uniform loading is about five times as much as that of nonuniform loading. The max displacement of the platform is 56.59 μm. Moreover, the repeated accuracy of positioning is tested and the results indicate that the max displacement deviation is 0.896 μm on the voltage of 50, 100, 150 V. It concludes that the calculation models of the stiffness and natural frequency are correct and the max displacement and accuracy match the design demand.
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ZHAO Rong-li, CHEN Xin, LI Ke-tian. Design and experiments of micro motion platform based on a pair of flexible parallel six-bar linkages[J]. Optics and Precision Engineering, 2015, 23(10): 2860
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Received: Mar. 20, 2015
Accepted: --
Published Online: Nov. 30, 2015
The Author Email: Rong-li ZHAO (zhaorl@gdut.edu.cn)