Chinese Optics Letters, Volume. 11, Issue s1, S10208(2013)

2-nm narrow band pass f ilter in standard conf iguration evaporate coating machine

Jingwei Li, R. Goetzelmann, Xiaoyi Wang, Jiangfan Wu, and Chang Xiao

High sophisticated optical monitoring systems like the OMS 5000 from Leyboldoptics are commonly used in vacuum coating system to improve the capabilities and reliability of production processes concerning optical performance and repeatability optics. This letter describes a method to perform high end optical filters with additional backside blocking over a wide spectral range. The direct monitoring with intermittent measurement on a large area rotating substrate holder is used to facilitate a narrow band pass filter of 2-nm half bandwidth at 532 nm and high transmittance together with a complex blocking filter to retard disturbing radiation from the ultraviolet (UV) range to the near infrared range. The machine is an ARES 1 350 coating system with basically standard configuration.

Tools

Get Citation

Copy Citation Text

Jingwei Li, R. Goetzelmann, Xiaoyi Wang, Jiangfan Wu, Chang Xiao. 2-nm narrow band pass f ilter in standard conf iguration evaporate coating machine[J]. Chinese Optics Letters, 2013, 11(s1): S10208

Download Citation

EndNote(RIS)BibTexPlain Text
Save article for my favorites
Paper Information

Category: Deposition and process control

Received: Dec. 20, 2012

Accepted: Jan. 20, 2013

Published Online: May. 30, 2013

The Author Email:

DOI:10.3788/col201311.s10208

Topics