Optics and Precision Engineering, Volume. 24, Issue 9, 2255(2016)

Dynamic hysteresis modeling and experimental verification of piezoelectric positioning stage

YANG Xiao-jing*... PENG Yun-hao and LI Yao |Show fewer author(s)
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    To improve the precision of rapid positioning of a piezoelectric positioning stage, a positioning model is established to characterize the relationship between driving voltage and output displacement of the platform. As the piezoelectric positioning stage for precision position in the fast and large stroke is not only affected by the hysteresis characteristics of the piezoelectric ceramics, but by the dynamic characteristics, this paper uses Bouc-Wen model to describe the hysteresis characteristics of piezoelectric ceramics, combines with the dynamic characteristics of the piezoelectric positioning stage to establish model, and lets the model reflect the dynamic characteristics and hysteresis characteristics of the platform. To verify the correctness of the model, the experimental equipment based on the piezoelectric micro displacement platform and the related driver is built, and model is verified by experiments, and a secondary development of monitor-control program is performed.The results show that, compared with the previous Bouc-Wen model,when proposed model in the maximum displacement output is 40 μm and the input voltage frequency is 40 Hz,the maximum error is reduced from 3.04 μm to 0.67 μm and the maximum relative error is 1.68%.The results show that the proposed model can better simulate the hysteresis characteristics and dynamic characteristics of the piezoelectric stage, and greatly improve the accuracy of the piezoelectric micro displacement platform in the fast and large stroke positioning.

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    YANG Xiao-jing, PENG Yun-hao, LI Yao. Dynamic hysteresis modeling and experimental verification of piezoelectric positioning stage[J]. Optics and Precision Engineering, 2016, 24(9): 2255

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    Paper Information

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    Received: Apr. 10, 2016

    Accepted: --

    Published Online: Nov. 14, 2016

    The Author Email: Xiao-jing YANG (xjyang@vip.sina.com)

    DOI:10.3788/ope.20162409.2255

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