Acta Photonica Sinica, Volume. 44, Issue 4, 405002(2015)

Fabrication of Broadband Sinusoidal Gold-coated Gratings

MUHUTIJIANG Bilali1...2,*, QIU Ke-qiang1, ZHENG Yan-chang1, XU Xiang-dong1 and FU Shao-jun1 |Show fewer author(s)
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    In order to satisfy the requirements of large aperture broadband gold-coated gratings groove depth uniformity in the high-power laser system, Broadband sinusoidal gold-coated gratings with line densities of 1 740 lines /mm and groove depth of 210 nm have been successfully fabricated via the methods of trapezoidal grating-coating-deposition and holographic lithography-deposition. The average diffraction efficiency at the -1 order ( Littrow mount) is above 87% and the peak value is 90% for TM polarized light spanning wavelengths from 750 to 850 nm. The experimental results show that Gratings groove depth can be easily controlled. After removing the coated photoresist, the substrate could be reused. Diffraction efficiency and bandwidth meet the requirements of the domestic general broadband pulse compression gold-coated gratings.

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    MUHUTIJIANG Bilali, QIU Ke-qiang, ZHENG Yan-chang, XU Xiang-dong, FU Shao-jun. Fabrication of Broadband Sinusoidal Gold-coated Gratings[J]. Acta Photonica Sinica, 2015, 44(4): 405002

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    Paper Information

    Received: Sep. 30, 2014

    Accepted: --

    Published Online: Apr. 28, 2015

    The Author Email: Bilali MUHUTIJIANG (bilalmu@mail.ustc.edu.cn)

    DOI:10.3788/gzxb20154404.0405002

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