Acta Optica Sinica, Volume. 3, Issue 2, 182(1983)
Dissociation of SiH4 with CW CO2 laser excition
The dissociation of lower concentration silane diluted with hydrogen has been investigated by OW CO2 laser excitation, and its mechanisan is analysed. The equation of dissociation rate and relationship between the rate and the laser power density is deduced. The experimental results are in accordance with theoritical analysis.
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WU ZHENQIU, LIU HANGQING, XU JIREN. Dissociation of SiH4 with CW CO2 laser excition[J]. Acta Optica Sinica, 1983, 3(2): 182
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